This article presents design, fabrication and characterization of lead zirconate titanate\n(PZT)-actuated micromirrors, which enable extremely large scan angle of up to 106ââ??¦ and high\nfrequency of 45 kHz simultaneously. Besides the high driving torque delivered by PZT actuators,\nmechanical leverage amplification has been applied for the micromirrors in this work to reach large\ndisplacements consuming low power. Additionally, fracture strength and failure behavior of poly-Si,\nwhich is the basic material of the micromirrors, have been studied to optimize the designs and\nprevent the device from breaking due to high mechanical stress. Since comparing to using biaxial\nmicromirror, realization of biaxial scanning using two independent single-axial micromirrors shows\nconsiderable advantages, a setup combining two single-axial micromirrors for biaxial scanning and\nthe results will also be presented in this work. Moreover, integrated piezoelectric position sensors\nare implemented within the micromirrors, based on which closed-loop control has been developed\nand studied.
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